Vacuum manipulators ikoreshwa mukwimuka cyangwa umwanya wafer cyangwa ibintu mubyumba byabigenewe byabugenewe no kubikoresho byo gukoresha ibikoresho. Zitanga ubwiyongere bworoshye kuko amahuza akomeye ntabwo akoreshwa. Vacuum manipulator zirimo ibikoresho byo gushiraho cyangwa amaherezo-akora. Abandi barimo gufunga imizigo hamwe nuduti twa wobble. Akenshi, manipulators ya vacuum ikoreshwa ifatanije nicyumba cya vacuum. Imashini ya Wafer cyangwa robot ni ubwoko bwikora bwa vacuum manipulators yo kwimura wafer cyangwa insimburangingo muri PVD, CVD, plasma etching cyangwa ibindi byumba bitunganya vacuum. Gukora icyumba cya vacuum, moteri ya vacuum cyangwa moteri ya vacuum isunika umwuka mubyombo kugeza igihe icyifuzo cyo munsi yikirere cyifuzwa kigeze. Niba icyumba cya vacuum kirimo vacuum ya ultra-high, noneho hagomba gukoreshwa moteri ya ultra-high vacuum manipulator na moteri ya ultra-high vacuum.
1. Igishushanyo cyihariye cyokunywa kirashobora gutuma ikintu kizamuka cyangwa kigwa uko bishakiye, ariko kandi kikazenguruka muburyo ubwo aribwo bwose bwicyicaro cyagenwe cyokunywa kugirango imikorere ikorwe kandi neza. Igishushanyo mbonera cya kure kizana korohereza imikorere kandi kirinda umutekano wabakoresha.
2. Clamp yimashini ikurura vacuum ifata isahani yatumijwe hanze, hamwe nimbaraga zikomeye za adsorption, umutekano muke no kurinda ibicuruzwa kwangirika.
3. Vacuum crane irashobora gutwara byoroshye ibintu byoroshye, bigoye kuzamura, hamwe nubuso bworoshye kugirango bitezimbere imikorere, kugabanya imbaraga zumurimo no kuzigama ibiciro byumushinga.